We present a semiempirical model based on the shadowing effect to describe quantitatively the aggregation of columnar structure during physical vapor condensation onto a surface with an array of line seeds and a flat surface. Specifically, we predict the relationship between the column angle and the incident flux angle and how this relationship changes with processing conditions and materials. The model uses one input parameter, the fan angle generated at normal incident flux. The model describes well our experimental data on the Ge column angle evolution as a function of a wide range of incident flux angles.
On-lattice particle simulation is one of the most common types of Monte Carlo simulations used in studying the dynamics of film growth. We report the observation of a large artificial anisotropic growth rate variation due to the fixed arrangement of particles in an on-lattice simulation of oblique angle deposition (OAD). This unexpectedly large anisotropy is not reported in previous literatures and substantially affects the simulation outcomes such as column angle and porosity, two of the most essential quantities in obliquely deposited nanostructures. The result of our finding is of interest to all on-lattice simulations in obliquely deposited films/nanostructures. PACS number(s): 68.55.J-, 05.10. Ln, 81.15.Aa
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