Barium titanate (BaTiO3) nanoparticles were prepared by wet chemical method using commercially available materials barium chloride, titanium dioxide and oxalic acid. Nano scale thin films of different thickness were coated on pre - cleaned glass substrate by using vacuum evaporation technique under a vacuum of 2x10-5 Torr. The X - ray analysis showed that the particles have tetragonal structure. The deposited films of a lower thickness were found to be amorphous in nature, whereas the crystallinity increases with increase of thickness. The estimated value of grain size (D), strain and dislocation density (δ) were also reported in this paper.
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