Detailed light-induced Electron Spin Resonance (ESR) measurements are performed at room temperature and liquid nitrogen temperature for hydrogenated amorphous silicon alloyed with various amounts of nitrogen. The increase in the ESR signal intensity with increasing illumination time can be described in terms of a fast increase and a slow increase. The fast-increase component decays faster after ceasing illumination than the slow-increase component. The origins of the two components are discussed.
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