Focused Electron Beam Induced Deposition (FEBID) for magnetic tip fabrication is presented in this work as an alternative to conventional sputtering-based Magnetic Force Microscopy (MFM) tips.

A new cathode for cold-field emission gun using a pyrolytic carbon-cone supported onto a carbon nanotube as the electron emitting tip has been developped. This tip was mounted in a TEM using a FIB based method, and the brightness measured under real operating conditions is 5 times better than obtained with a standard tungsten tip. Its use overcomes the many technical difficulties which have dogged the use of carbon nanotube-based tips as proposed replacements for tungsten tips. The resulting properties of the final CFEG exhibit a very good energy spread of 0.32eV, a reduced brightness of 1.6×10 9 A.m-2 .sr-1 .V-1 and a very good long-term stability with a current damping less than 16% per hour.