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The effect of lens aberrations on the process windows of a 248nm stepper is presented for multiple locations within the exposure field and for various illumination conditions. It is shown that the effect on the process window depends on the field location and the illumination condition. The common process window for multiple field locations is significantly reduced from the single location result. Process window data obtained with one illumination condition is shown to be useful in predicting results with other illumination conditions.

We assessed the spatial distribution of 35 elements in aquifer sediments and groundwater of a crude-oil-contaminated aquifer and show evidence of the dissolution of barium (Ba), strontium (Sr), cobalt (Co), and nickel (Ni) during hydrocarbon oxidation coupled to historic microbial Fe(III)-reduction near the oil. Trace element plumes occur in the crude-oil-contaminated aquifer, where 50% Co, 47% Ni, 24% Ba, and 15% Sr have been mobilized from the sediment near the oil into groundwater, resulting in dissolved masses >33, 18, three, and two times greater than estimated dissolved masses prior to contamination, respectively. Ba2+ and Ni2+ concentrations exceeded the World Health Organization’s drinking-water guidelines of 700 and 20 μg/L, respectively. Sediments attenuate trace element plumes in two geochemically distinct zones, resulting in <0.01% total trace element masses dissolved in groundwater, despite the substantial mobilization near the oil body. Geochemical modeling of the modern Fe(III)-reducing zone suggests trace elements are likely attenuated via coprecipitation with/without sorption on iron carbonate precipitates. In the suboxic transition zone at the leading edge of the plume, Fe(III)-hydroxides sorb Ba2+, Sr2+, Co2+, and Ni2+. This study emphasizes that slow but persistent biogeochemical activity can substantially alter aquifer chemistry over decadal timeframes, a phenomenon we term biogeochemical gradualism.