Gas flow control is important factor that influences the concentration of process gas and the pressure of the process chamber. In manufacturing processes that use metal organic (MO) gases, a system that controls the flow rate of MO gas must be developed to improve film performance and the reliability of film formation. We have developed a high temperature flow control system based on pressure measurements (HT-FCS) to control the flow rate of MO gas. Moreover, a liquid source control system that combines a HT-FCS and vaporizer was developed. Using this system, it was possible to control the flow rate of MO gas with high accuracy for extended periods. A flow control system that can supply MO gas with a stable flow rate by vaporizing MO material with the quantity needed at each time has been realized.
We investigated both the Seebeck and anomalous Nernst effects in NiCo 2 O 4 (001) epitaxial films with a preferential magnetization direction normal to the film plane. Since the thermoelectric signals were extremely small, we custom-built a measurement system to detect the weak voltage signals. To suppress spurious voltage signals originating from the electrical contacts in the measurement circuit, we employed the following measures. We reduced the number of electrical contacts between the output of a commercial cryostat with a superconducting magnet and the nano-voltmeters. We employed silver soldering while making the electrical contacts to reduce the thermal electromotive force voltages at the remaining contacts. By adopting these measures, we have succeeded in detecting thermoelectric voltages as small as 5 nV. The observed thermoelectric efficiency of NiCo 2 O 4 is quite small compared to conventional ferromagnetic metals.
We have developed a method to detect specific proteins with a high sensitivity using a gel electrophoresis method and force measurement of atomic force microscopy (AFM). Biotinylated proteins were separated by electrophoresis and fixed with cross-linking chemicals on the gel, followed by direct force measurement between the biotinylated proteins on the gel and a streptavidin modified tip of an AFM cantilever. We were able to achieve a high enough sensitivity to detect the picogram order of the biotinylated proteins by evaluating the frequency of the interaction force larger than 100pN in the force profile, which corresponds to the rupture force of interaction between streptavidin and biotin.
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