Langmuir-Blodgett (L-B) films prepared from 18,18,18-trifluorooctadecanoic acid [CF 3 (CH 2 ) 16 -COOH], perfluorotetradecanoic acid [n-C 13 F 27 COOH], or octadecanoic acid [n-C 17 H 35 COOH] were used as target surfaces for hyperthermal ion-surface collisions. The synthesis of 18,18,18-trifluorooctadecanoic acid and the preparation of the L-B film from this compound using a subphase containing Al 3+ are reported in this paper. The Ion-surface collision results show that the outermost surface group, namely CF 3 vs CH 3 , is the main determinant for the efficiency of both energy transfer and electron transfer during low-energy (e.g., 10-100 eV) polyatomic ion-surface collisions. For atomic projectile ions, there is evidence of penetration into a depth of the films.

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