In this paper, a distributed parameter model is used to study the pull-in instability of cantilever type nanomechanical switches subjected to intermolecular and electrostatic forces. In modeling of the electrostatic force, the fringing field effect is taken into account. The model is nonlinear due to the inherent nonlinearity of the intermolecular and electrostatic forces. The nonlinear differential equation of the model is transformed into the integral form by using the Green's function of the cantilever beam. Closed-form solutions are obtained by assuming an appropriate shape function for the beam deflection to evaluate the integrals. The pull-in parameters of the switch are computed under the combined effects of electrostatic and intermolecular forces. Electrostatic microactuators and freestanding nanoactuators are considered as special cases of our study. The detachment length and the minimum initial gap of freestanding nano-cantilevers, which are the basic design parameters for NEMS switches, are determined. The results of the distributed parameter model are compared with the lumped parameter model.

In this paper the two-point boundary value problem (BVP) of the cantilever deflection at nano-scale separations subjected to van der Waals and electrostatic forces is investigated using analytical and numerical methods to obtain the instability point of the beam. In the analytical treatment of the BVP, the nonlinear differential equation of the model is transformed into the integral form by using the Green's function of the cantilever beam. Then, closed-form solutions are obtained by assuming an appropriate shape function for the beam deflection to evaluate the integrals. In the numerical method, the BVP is solved with the MATLAB BVP solver, which implements a collocation method for obtaining the solution of the BVP. The large deformation theory is applied in numerical simulations to study the effect of the finite kinematics on the pull-in parameters of cantilevers. The centerline of the beam under the effect of electrostatic and van der Waals forces at small deflections and at the point of instability is obtained numerically. In computing the centerline of the beam, the axial displacement due to the transverse deformation of the beam is taken into account, using the inextensibility condition. The pull-in parameters of the beam are computed analytically and numerically under the effects of electrostatic and/or van der Waals forces. The detachment length and the minimum initial gap of freestanding cantilevers, which are the basic design parameters, are determined. The results of the analytical study are compared with the numerical solutions of the BVP. The proposed methods are validated by the results published in the literature.

In this paper, the large amplitude free vibration of a doubly clamped microbeam is considered. The effects of shear deformation and rotary inertia on the large amplitude vibration of the microbeam are investigated. To this end, first Hamilton’s principle is used in deriving the partial differential equation of the microbeam response under the mentioned conditions. Then, implementing the Galerkin’s method the partial differential equation is converted to an ordinary nonlinear differential equation. Finally, the method of multiple scales is used to determine a second-order perturbation solution for the obtained ODE. The results show that nonlinearity acts in the direction of increasing the natural frequency of the doubly clamped microbeam. Shear deformation and rotary inertia have significant effects on the large amplitude vibration of thick and short microbeams.

In this paper, the two-point boundary value problem (BVP) of the nano-cantilever deflection subjected to Casimir and electrostatic forces is investigated using analytical and numerical methods to obtain the instability point of the nano-beam. In the analytical treatment of the BVP, the nonlinear differential equation of the model is transformed into the integral form by using the Green's function of the cantilever beam. Then, closed-form solutions are obtained by assuming an appropriate shape function for the beam deflection to evaluate the integrals. The pull-in parameters of the beam are computed under the combined effects of electrostatic and Casimir forces. Electrostatic microactuators and freestanding nanoactuators are considered as special cases of our study. The detachment length and the minimum initial gap of freestanding nanocantilevers, which are the basic design parameters for NEMS switches, are determined. The results of the analytical study are verified by numerical solution of the BVP. The centerline of the beam under the effect of electrostatic and Casimir forces at small deflections and at the point of instability is obtained numerically to test the validity of the shape function assumed for the beam deflection in the analytical investigation. Finally, the large deformation theory is applied in numerical simulations to study the effect of the finite kinematics on the pull-in parameters of nano-canilevers.

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