Liquid-phase electronic circuits are patterned on an elastomer substrate with a microcontact printer. The printer head dips into a pool of a liquid-phase gallium-indium alloy, e.g., eutectic gallium-indium (EGaIn) or gallium-indium-tin (Galinstan), and deposits a single drop on a silicone elastomer substrate. After patterned deposition, the liquid-phase circuit is sealed with an additional layer of silicone elastomer. We also demonstrate patterned deposition of the liquid-phase GaIn alloy with a molded polydimethylsiloxane stamp that is manually inked and pressed into an elastomer substrate. As with other liquid-phase electronics produced through needle injection or masked deposition, the circuit is elastically deformable and can be stretched to several times its natural length without losing electronic functionality. In contrast to existing fabrication techniques, microcontact printing and stamp lithography can be used to produce circuits with any planar geometric feature, including electrodes with large planar area, intersecting and closed-loop wires, and combs with multiple terminal electrodes. In air, the surface of the coalesced droplets oxidize to form a thin oxide skin that preserves the shape of the circuit during sealing. This first demonstration of soft-lithography fabrication with liquid-phase GaIn alloy expands the space of allowable circuit geometries and eliminates the need for mold or mask fabrication.
A method to produce soft and stretchable microelectronics composed of a liquid-phase Gallium-Indium alloy with micron-scale circuit features is introduced. Microchannels are molded onto the surface of a poly(dimethylsiloxane) (PDMS) elastomer and filled with EGaIn using a micro-transfer deposition step that exploits the unique wetting properties of EGaIn in air. The liquid-filled channels function as stretchable circuit wires or capacitor electrodes with a 2 μm linewidth and 1 μm spacing.
Highly elastic conductive polymeric MEMS J Ruhhammer, M Zens, F Goldschmidtboeing et al. A review of the hybrid techniques for the fabrication of hard magnetic microactuators based on bonded magnetic powders
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