Modeling of capacitive micromachined ultrasonic transducers (cMUTs) is based on a two-port network with an electrical and a mechanical side. To obtain a distributed model, a solution of the differential equation of motion of the diaphragm for each element of the transducer has to be found. Previous works omit the mechanical load of the cavity behind the diaphragm, i.e., the effect of the gas inside. In this paper, we propose a distributed model for cMUTs that takes this effect into account. A closed-form solution of the mechanical impedance of the membranes has been obtained, including the effect of the restoring forces because of the stiffness of the membrane and because of the compression of the air in the cavity. Simulation results based on the presented model are compared with the experimental data for two types of cMUTs reported in the recent literature. It is demonstrated that the compression of the air has a significant effect on the fundamental frequency of the air transducer, with a deviation of about 22% from the prediction of a model that does not consider the interaction between the vibrating diaphragm and the air cushion
In the present work, a traveling wave ultrasonic motor (TWUSM) is proposed. It is composed of an annular-shaped stator and two cone-shaped rotors that are pressed in contact to the borders of the inner surface of the stator. A rotating traveling wave has been generated in the stator by using as vibration generators two bolted Langevin transducers (BLT) opportunely shifted in space and in time. The vibrational behavior of the stator as well as the traveling wave generation has been simulated with the finite-element method (FEM) software. A prototype of the motor has been manufactured and experimentally characterized. It exhibits a static torque of about 0.8 N-m and a maximum angular speed of about 300 rpm. Possible variations of the present design aimed to increase output torque or minimize encumbrance are described and discussed
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