This paper presents possibility of laser application for fabrication of 3D elements and structures. The Aurel NAVS‐30 Laser Trimming and Cutting System with special software was used. It was applied successfully for fabrication of vias (minimum diameter – 50 μm) in fired and unfired LTCC ceramics and channels with width between 100 μm and 5 mm. The achievements and problems are presented and discussed. The influence of lamination process on quality of vias and channels as well as the problems connected with interaction of laser beam with ceramic tapes are shown. Three‐dimensional resistors and microfluidic system were successfully designed and fabricated based on our investigations. Chosen electrical and thermal parameters of constructed devices are shown, too.

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This paper discusses thick-film resistive temperature sensors investigated at the Technical University of Wroclaw. The technology and electrical properties of resistance temperature detectors, thermistors, low-temperature thermometers and heating elements are presented. The R(T) curve of chosen air-fireable Ni - P based films agrees with Ni wire. The initially aged thermistors from the system can operate in the range from room temperature up to 673 K. The commercial thick-film resistors modified by the negative TCR drivers (e.g. powder) are fully suitable for low-temperature measurements in the range from 20 to 100 K. The integrated gas sensors need heaters because temperature influences their sensitivity, selectivity and response time. The thick-film compatible system based on commercially available resistive and conductive inks allows continuous long-term electrical heating of the sensor up to 673 K. The admissible operating temperature is much higher for the heaters made from conductive inks; for example fritless platinum heaters are satisfactory up to 1073 K.

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