We present a rigorous approach for designing a highly efficient coupling between single mode optical fibers and silicon nanophotonic waveguides based on diffractive gratings. The structures are fabricated on standard SOI wafers in a cost-effective CMOS process flow. The measured coupling efficiency reaches -1.08 dB and a record value of -0.62 dB in the 1550 nm telecommunication window using a uniform and a nonuniform grating, respectively, with a 1 dB-bandwidth larger than 40 nm.
We report a highly efficient grating coupler fabricated using a CMOS-compatible technology process with a record efficiency of -0.64 dB (86.3 %) at a wavelength of 1527 nm and a 1dBbandwidth of 44 nm. The performance of the structure is enhanced through a backside metal mirror and the use of a nonuniform grating.
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