For two-dimensional (2D) layered semiconductors, control over atomic defects and understanding of their electronic and optical functionality represent major challenges towards developing a mature semiconductor technology using such materials. Here, we correlate generation, optical spectroscopy, atomic resolution imaging, and ab initio theory of chalcogen vacancies in monolayer MoS2. Chalcogen vacancies are selectively generated by in-vacuo annealing, but also focused ion beam exposure. The defect generation rate, atomic imaging and the optical signatures support this claim. We discriminate the narrow linewidth photoluminescence signatures of vacancies, resulting predominantly from localized defect orbitals, from broad luminescence features in the same spectral range, resulting from adsorbates. Vacancies can be patterned with a precision below 10 nm by ion beams, show single photon emission, and open the possibility for advanced defect engineering of 2D semiconductors at the ultimate scale.
We demonstrate that optically active emitters can be locally generated by focusing a He-ion beam onto monolayer WS2 encapsulated in hBN. The emitters show a low-temperature photoluminescence spectrum, which is well described by an independent Boson model for localized emitters. Consistently, the photoluminescence intensity of the emitters saturates at low excitation intensities, which is distinct to the photoluminescence of excitonic transitions in the investigated WS2 monolayers. The demonstrated method allows us to position defect emitters in WS2 monolayers on demand. A statistical analysis suggests the generation yield of individual emitters to be as high as 11% at the highest investigated He-ion doses.
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