Studies on information processing and learning properties of neuronal networks would benefit from simultaneous and parallel access to the activity of a large fraction of all neurons in such networks. Here, we present a CMOS-based device, capable of simultaneously recording the electrical activity of over a thousand cells in in vitro neuronal networks. The device provides sufficiently high spatiotemporal resolution to enable, at the same time, access to neuronal preparations on subcellular, cellular, and network level. The key feature is a rapidly reconfigurable array of 26 400 microelectrodes arranged at low pitch (17.5 μm) within a large overall sensing area (3.85 × 2.10 mm(2)). An arbitrary subset of the electrodes can be simultaneously connected to 1024 low-noise readout channels as well as 32 stimulation units. Each electrode or electrode subset can be used to electrically stimulate or record the signals of virtually any neuron on the array. We demonstrate the applicability and potential of this device for various different experimental paradigms: large-scale recordings from whole networks of neurons as well as investigations of axonal properties of individual neurons.

To advance our understanding of the functioning of neuronal ensembles, systems are needed to enable simultaneous recording from a large number of individual neurons at high spatiotemporal resolution and good signal-to-noise ratio. Moreover, stimulation capability is highly desirable for investigating, for example, plasticity and learning processes. Here, we present a microelectrode array (MEA) system on a single CMOS die for in vitro recording and stimulation. The system incorporates 26,400 platinum electrodes, fabricated by in-house post-processing, over a large sensing area (3.85 × 2.10 mm 2 ) with sub-cellular spatial resolution (pitch of 17.5 μm). Owing to an area and power efficient implementation, we were able to integrate 1024 readout channels on chip to record extracellular signals from a user-specified selection of electrodes. These channels feature noise values of 2.4 μV rms in the action-potential band (300 Hz-10 kHz) and 5.4 μV rms in the local-field-potential band (1 Hz-300 Hz), and provide programmable gain (up to 78 dB) to accommodate various biological preparations. Amplified and filtered signals are digitized by 10 bit parallel single-slope ADCs at 20 kSamples/s. The system also includes 32 stimulation units, which can elicit neural spikes through either current or voltage pulses. The chip consumes only 75 mW in total, which obviates the need of active cooling even for sensitive cell cultures. I IntroductionEXTRACELLULAR RECORDINGS of the electrical activity of neural and cardiac cell networks in organs such as the brain, the retina, or the heart, can provide a wealth of information about the physiology as well as the pathological degenerations that may cause diseases, such as Parkinson's or Alzheimer's. Microelectrode arrays (MEAs) have been used for a long time for in vitro extracellular recordings of electrogenic cell cultures and tissues, such as acute or organotypic brain slices and retinae [1]- [3]. They provide simultaneous multisite recording capability, which is essential to study cellular interconnections and network properties that arise from synchronized cellular activity [4], [5]. However, passive MEAs, which typically include metal electrodes on a glass substrate, are limited in both the number of electrodes (usually less than 300) and the spatial resolution (typically ≥ 30 μm),features that are needed to reconstruct large neural networks at cellular detail.With CMOS technology, these limitations can be overcome by using multiplexing techniques, which enable access to a large number of closely-spaced electrodes to obtain large sensing areas at high spatial resolution [6]. Moreover, the monolithic integration of recording amplifiers and ADCs, on the same substrate with the electrodes, avoids off-chip parasitics and interference and, at the same time, allows for realizing a large number of recording channels with a low number of connections. In this paper, we present a recently developed CMOS MEA system that further exploits the switch-matrix approach. The system preserves s...

Biological cells are characterized by highly complex phenomena and processes that are, to a great extent, interdependent. To gain detailed insights, devices designed to study cellular phenomena need to enable tracking and manipulation of multiple cell parameters in parallel; they have to provide high signal quality and high spatiotemporal resolution. To this end, we have developed a CMOS-based microelectrode array system that integrates six measurement and stimulation functions, the largest number to date. Moreover, the system features the largest active electrode array area to date (4.48×2.43 mm 2 ) to accommodate 59,760 electrodes, while its power consumption, noise characteristics, and spatial resolution (13.5 μm electrode pitch) are comparable to the best state-of-the-art devices. The system includes: 2,048 action-potential (AP, bandwidth: 300 Hz to 10 kHz) recording units, 32 local-field-potential (LFP, bandwidth: 1 Hz to 300 Hz) recording units, 32 current recording units, 32 impedance measurement units, and 28 neurotransmitter detection units, in addition to the 16 dual-mode voltage-only or current/voltagecontrolled stimulation units. The electrode array architecture is based on a switch matrix, which allows for connecting any measurement/stimulation unit to any electrode in the array and for performing different measurement/stimulation functions in parallel. Index Termshigh-density microelectrode array (HD-MEA); neural interface; multi-functionality; high channel count; low noise; low power; switch matrix; extracellular recording and stimulation; neurotransmitter detection; impedance spectroscopy; pre-charging; pseudo-resistor I IntroductionElectrogenic cells, such as neuronal, cardiac, and pancreatic cells are capable of generating and transmitting electrical signals. The flow of ions through the cell membrane generates changes in electrical potentials that can be measured using standard electronic circuitry. Apart from electrical signals, cells also use chemical compounds for signaling, as it is the case in neuronal synapses (contacts between neuronal cells). The chemicals that transmit signals across the synaptic cleft, so-called neurotransmitters, play a significant role in brain diseases, such as schizophrenia, Alzheimer's, and Parkinson's disease [1]; their presence is detectable by means of electrochemical methods, typically, cyclic voltammetry, [2]- [4]. To study cell network dynamics, a bidirectional interaction, which also includes electrical stimulation of cells, is desired. To ensure precise and selective stimulation of individual neurons, characterization of the electrodes [5], the cell-electrode attachment, and the cell morphology [6] is first performed, typically by means of impedance spectroscopy [7]. This In this paper, we present a high-density MEA system that allows performing multiple measurement/stimulation functions in parallel (Fig. 1). The implemented switch-matrix approach [18], [22] allows connecting any electrode to any of the measurement/stimulation channels. Moreover,...

Microfluidic hanging-drop networks enable culturing and analysis of 3D microtissue spheroids derived from different cell types under controlled perfusion and investigating inter-tissue communication in multi-tissue formats. In this paper we introduce a compact on-chip pumping approach for flow control in hanging-drop networks. The pump includes one pneumatic chamber located directly above one of the hanging drops and uses the surface tension at the liquid-air-interface for flow actuation. Control of the pneumatic protocol provides a wide range of unidirectional pulsatile and continuous flow profiles. With the proposed concept several independent hanging-drop networks can be operated in parallel with only one single pneumatic actuation line at high fidelity. Closed-loop medium circulation between different organ models for multi-tissue formats and multiple simultaneous assays in parallel are possible. Finally, we implemented a real-time feedback control-loop of the pump actuation based on the beating of a human iPS-derived cardiac microtissue cultured in the same system. This configuration allows for simulating physiological effects on the heart and their impact on flow circulation between the organ models on chip.

A monolithic multi-functional CMOS microelectrode array system was developed that enables label-free electrochemical impedance spectroscopy of cells in-vitro at high spatiotemporal resolution. The electrode array includes 59,760 platinum microelectrodes, densely packed within a 4.5 mm×2.5 mm sensing region at a pitch of 13.5 μm. 32 on-chip lock-in amplifiers can be used to measure the impedance of any arbitrarily chosen subset of electrodes in the array. A sinusoidal voltage, generated by an on-chip waveform generator with a frequency range from 1 Hz to 1 MHz, was applied to the reference electrode. The sensing currents through the selected recording electrodes were amplified, demodulated, filtered and digitized to obtain the magnitude and phase information of the respective impedances. The circuitry consumes only 412 μW at 3.3 V supply voltage and occupies only 0.1 mm2, for each channel. The system also included 2048 extracellular action-potential recording channels on the same chip. Proof of concept measurements of electrical impedance imaging and electrophysiology recording of cardiac cells and brain slices are demonstrated in this paper. Optical and impedance images showed a strong correlation.