ResumoEstudou-se as propriedades de filmes finos de TiO2 depositados em substratos de vidro.Os filmes foram obtidos pelos métodos Sol-gel e Evaporação por feixe de elétrons (e-beam) visando obter a propriedade autolimpante. Essa propriedade dos filmes de TiO2 está relacionada à hidrofilicidade fotoinduzida e pode viabilizar várias aplicações tecnológicas como a obtenção de vidros autolimpantes para módulos fotovoltaicos. O tetraisopropóxido de titânio foi utilizado como precursor no método sol-gel com deposição dip-coating. Na evaporação e-beam, partiu-se do TiO2 sólido. Os filmes passaram por diferentes tratamentos térmicos e as propriedades dos filmes obtidos pelas duas técnicas de deposição. A cristalinidade da fase anatásio foi identificada por DRX de baixo ângulo. A espessura foi medida por perfilometria e Microscopia de Força Atômica, obtendo-se valores próximos de 170 nm. Parâmetros como topografia, rugosidade e tamanho dos cristais de anatásio foram avaliados. A transmitância das placas de vidro com os filmes depositados foi medida por espectrofotometria UV-Vis. O caráter hidrofílico dos filmes finos foi comprovado por meio de medidas do ângulo de contato com água. Os filmes obtidos por ambas as técnicas apresentaram boa capacidade autolimpante devido ao efeito da hidrofilicidade fotoinduzida sob radiação UV. Palavras-chave: Dióxido de titânio; Filmes finos; Efeito autolimpante. STUDY OF TIO 2 THIN FILMS OBTAINED BY SOL-GEL METHOD AND E-BEAM EVAPORATION AbstractThe properties of TiO 2 thin films deposited on glass substrates were studied. These films were obtained by Sol-gel method and electron beam (e-beam) evaporation aimingtheir self-cleaning ability. This property of TiO 2 films may be related to photo-induced hydrophilicity and has technological applications such as self-cleaning glass photovoltaic modules. Titanium tetraisopropoxide was used as a precursor in dip-coating sol-gel method. In e-beam evaporation, TiO 2 target was used. The films have undergone different heat treatments and film properties obtained by the two deposition techniques were compared. The crystallinity of the anatase phase was identified by low angle X-ray diffraction. The thickness of the films was measured by profilometry and Atomic Force Microscopy obtaining values close to 170 nm. Parameters such as topography, roughness and crystallite size of the films were evaluated. The optical transmittance of the deposited glass films was measured by UV-Vis spectrophotometry. The hydrophilic character of the thin films was evaluated by water contact angle measurements. All these properties are important in assessing the potential application of TiO 2 films such as selfcleaning surfaces. TiO 2 films obtained by both techniques have presented good photoinduced hydrophilicity under ultraviolet light.
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