The study's aim was to identify the 3-D surface spatial parameters that describe the 3-D surface microtexture of the nickel–carbon (Ni–C) nanocomposite thin films composed of Ni nanoparticles with different average sizes embedded in amorphous hydrogenated carbon, prepared by the combining radio frequency magnetron sputtering technique and plasma-enhanced chemical vapor deposition (RF-PECVD). The deposition time was varied at 7, 10 and 13 min, respectively. The sample investigation was performed using an atomic force microscope, and the obtained data were analyzed and visualized using MountainsMap® Premium software to determine their stereometric surface engineering characteristics. The results from this study provide not only fundamental insights into the texture characteristics, but also directions toward their implementation in nanotribological models.
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