The interstitial carbon-interstitial dioxygen complex (C i O 2i ) has a deep state close to the mid bandgap of Si and can be an efficient recombination center. In this work, the annealing kinetics of C i O 2i in p-type, boron doped, Czochralski grown (Cz) silicon are studied. Two sets of samples are irradiated at room temperature (RT) with 1.8 MeV protons to doses of 1 Â 10 13 cm À2 (set A) and 5 Â 10 13 cm À2 (set B). After irradiation, the samples of both sets are pre-annealed at 400 C for 30 h in order to anneal out the well-known interstitial carbon-interstitial oxygen (C i O i ) complex and to form the C i O 2i complex. The annealing of C i O i and formation of C i O 2i is monitored by deep level transient spectroscopy (DLTS) via observation of the corresponding electronic levels at 0.36 eV and 0.39 eV above the valence band edge (E V ), respectively. The samples are then subjected to isothermal annealing treatments in the temperature range 450-550 C. The annealing of C i O 2i follows a first order kinetics, exhibiting an activation energy of 2.55 eV, and a pre-exponential factor in the range (2-30) Â 10 12 s À1 . The kinetics and the deduced parameters suggest that C i O 2i anneals out by dissociation rather than diffusion mechanism.
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