Infrared radiation bolometer which is made of thin film of a aSi:H is thermally modeled using 3-d finite element analysis method (FEA) .This bolometer is realized in a multilevel electro thermal structure having high fill factor. Using the multilevel structure, thermal isolation can be indepentely optimized without sacrificing IR absorption area. The design show that thermal time constant of 12.95 ms, responsivity of 4.65X10 3 V/W,and detcetivity of 7.97X10 8 cm Hz 1/2 w-1 can be achieved in 50µmx50µm michromachined structure.
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