Relative abundances of differently charged ions were calculated following inner-shell ionization. The charge distributions have been computed as a function of the atomic number. Monte Carlo method has been used to simulate the vacancy cascades in atoms of atomic number 7 5 Z 5 60. The calculations have been made by tracing successive radiative and nonradiative transitions and electron shake off. Input data have been calculated from MCDF and DFS wave functions. It has been found that the effects of electron shake off and energy forbidden Auger transitions play an essential role in the cascade development.Results are compared with experiments and some theoretical values from literature.
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