In this letter, we report the unique design, simulation and experimental verification of an electrically tunable THz metamaterial perfect absorber consisting of complementary split ring resonator (CSRR) arrays integrated with liquid crystal as the subwavelength spacer in between. We observe a shift in resonance frequency of about 5.0 GHz at 0.567 THz with a 5 V bias voltage at 1KHz between the CSRR and the metal backplane, while the absorbance and full width at half maximum bandwidth are maintained at 90% and 0.025 THz, respectively. Simulated absorption spectrum by using a uniaxial model of LC matches perfectly the experiment data and demonstrates that the effective refractive index of LC changes between 1.5 and 1.7 by sweeping a 1 kHz bias voltage from 0 V to 5 V. By matching simulation and experiment for different bias voltages, we also estimate the angle of LC molecules versus the bias voltage. Additionally, we study the created THz fields inside the spacer to gain a better insight of the characteristics of tunable response of this device. This structure and associated study can support the design of liquid crystal based tunable terahertz detectors and sensors for various applications.
Controlled plasma etching processes based on fluorine-based plasmas to fabricate nanostructure in silicon nitride material are reported. These processes were optimized in terms of etch rate, sidewall profile and selectivity over resist mask material.
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