It has been found that the silicon nanowires modified with noble metals can be used to fabricate an effective H 2 gas sensor in the present study. The preparation and surface modification of silicon nanowires (SiNWs) were carried out by chemical methods. The morphology of the silicon nanowires unmodified and modified with nanoparticles of platinum, palladium, silver and gold was investigated using scanning electron microscopy (SEM). The chemical composition of the silicon nanowire layers was studied by secondary ion mass spectroscopy (SIMS) and energy dispersive X-ray analysis (EDX). The structures of type metal/SiNWs/p-Si/Al were fabricated. The electrical characterization (I-V) was performed in primary vacuum and H 2 at different concentrations. It was found that the metal type used to modify the SiNWs strongly influenced the I-V characteristics. The response of these structures toward H 2 gas was studied as a function of the metal type. Finally, the sensing characteristics and performance of the sensors were investigated.

International audienceIn this paper, we prove theoretically and experimentally the existence of complete ultrasonic band gap in phononic crystal beam. The phononic beam structure studied is composed of a linear lattice array of square pillars on a beam, made with aluminum-fortal easily machinable at centimetric scale. Ultrasonic characterization of phononic beam guides shows the existence of a frequency range where the transmitted signals are strongly attenuated, due to the presence of ultrasonic band gap, in agreement with theoretical results predicted by finite element simulation. These structures present a potential for the use as energy loss reduction in micromechanical resonators at high frequency regime

In this work, we investigate numerically the propagation of Lamb waves in a film bulk acoustic resonator (FBAR) structure formed by piezoelectric ZnO layer sandwiched between two Mo electrodes coupled with Bragg reflectors; the system is thus considered as a phononic-crystal (PnC) plate. The aim is to suppress the first-order symmetric Lamb wave mode considered as a spurious mode caused by the establishment of a lateral standing wave due to the reflection at the embedded lateral extremities of the structure; this spurious mode is superposing to the main longitudinal mode resonance of the FBAR. The finite element study, using harmonic and eigen-frequency analyses, is performed on the section of FBAR structure coupled with the PnC. In the presence of PnC, the simulation results show the evidence of a selective band gap where the parasitic mode is prohibited. The quality factor of the FBAR is enhanced by the introduction of the PnC. Indeed, the resonance and antiresonance frequencies passed from 1000 and 980 (without PnC) to 2350 and 1230 (with PnC), respectively. This is accompanied by a decrease in the electromechanical coupling coefficient from 10.60% to 6.61%.

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