A fully kinetic theory model of the sheath of a dc glow discharge is presented. This model includes a direct numerical solution of Boltzmann equations for the spatial and velocity dependence of the electron and Ar+ distribution functions with a self-consistent electric field calculated from the Poisson equation. The solution is obtained using a collocation method that employs Legendre quadrature points for both angular and spatial variables, and nonclassical speed quadrature points for velocity. The results of the steady state direct numerical solution are compared with a particle-in-cell Monte Carlo simulation. As anticipated, it is found that the space- and energy-dependent ion distribution function varies strongly with a decrease in the ratio of the Debye length to the ion mean free path.
A fully kinetic theory model was developed to study plasma properties of the sheath of a direct current glow discharge. This model includes a direct numerical solution of the Boltzmann equations for electron and ion distribution functions with a self-consistent electric field obtained from the Poisson equation. The calculated profiles of density, drift velocity, temperature, and electric potential were used to show the structure of the plasma sheath. The results of the direct numerical solution were compared with a particle-in-cell Monte Carlo simulation. It was also demonstrated that for a small Debye length to the ion mean-free path ratio, results obtained using the continuum sheath model, which includes two parameters, can be matched to the kinetic theory simulations.
Gain and loss mechanisms for neutral species in low pressure fluorocarbon plasmas by infrared spectroscopy J. Vac. Sci. Technol. A 30, 051308 (2012); 10.1116/1.4746411 Low-energy dissociative electron attachment to BrCN and CBrCl 3 : Temperature dependences and reaction dynamics Monte Carlo simulation of electron transport in carbon tetrafluoride discharge plasma
The Monte Carlo technique was used to investigate electron transport in the carbon tetrafluoride discharge plasma. A set of total elastic and inelastic cross sections was assembled on the basis of the critical survey of Christophorou, Olthoff, and Rao [J. Phys. Chem. Ref. Data 25, 1341 (1996)]. Particular attention was given to the derivation of the total and angular elastic cross sections at energies close to the Ramsauer minimum. The experimental angular elastic cross sections were fitted to analytic functions suitable for implementation in the Monte Carlo calculations. Angular inelastic cross sections were analytically represented using a simple Born approximation. Superelastic collisions were included in the calculations in an effort to account properly for the behavior of electrons at low energies. The transport coefficients obtained with the direct simulation agreed with the measurements for the electric field to gas density ratios (E/N) in the range 0.01⩽E/N⩽300 Td. Agreement between calculated and measured reaction-rate coefficients was obtained for E/N below 200 Td. The effect of both elastic and inelastic anisotropic scattering on electron transport in carbon tetrafluoride was studied in detail. This system is typical of molecular systems with a Ramsauer minimum in the elastic cross section.
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