This article briefly summarizes the work of the author in the field of vacuum arc ion sources from the first version made in 1984, which generated metal ion beams of 20 cm diam with ion current up to 1 A at an accelerating voltage up to 130 kV, pulse duration of 300 μs, and repetition rate up to 50 Hz, for doing high dose implantation, to the creation in 1987 of the Technological Accelerator of Metal ions and Electron Kit (TAMEK) source which can produce, without switching off the source, the regimes of high-dose implantation, ion deposition, ion-beam mixing, and ion-beam-assisted deposition of the same metal ions, as well as the generation of electron beams with the same time and energy parameters and current up to 10 A. Sources with a vacuum arc current of several amperes (Iarc≳2 A, Ii≳0.1 A for a copper cathode) and milliseconds duration, and with a vacuum arc current up to 100 kA (Ii=1–10 kA) and microseconds duration, are described. Application of TAMEK sources for improving the properties of surface layers of metal and dielectric materials are also discussed.
Unlike widely published sources MEVVA, since 1984 we have constructed vacuum arc ion sources of any hard electroconductive materials (like metal or composites type—TiC, TiSiC, NiCrAlY, MoS, TiMoSi, WAlB, TiBNi) for modification of materials. The principle of Technological Accelerator of Metal ion and Electron Kit—source TAMEK, provides realization of regimes mentioned in the title in each (or in any series) of a sequence of f=50 Hz pulses: t=300 μs, Ii<1 A, Ei<200 keV, dDi=1016 ion/cm2/min for implantation and t=1000 μs, Iarc<2000 A, dh=50–200 nm/min for deposition and so realized, if you wish, ion implantation, deposition, mixing, ion-beam-assisted deposition of the same ions without switching off the source. The experimental data demonstrate the possibility of obtaining mutual mixed (10×90 at %) alloyed layers up to 3 μm for time in t=15 min at T=100 °C temperature surface, with structure improving (microhardness) inner layer up to 50 μm in depth and possibility of further coating growth on the surface. This report presents a brief review of TAMEK principle design and its application for modification of constructed materials.
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