Abstract:We show that nano-mechanical interaction using atomic force microscopy (AFM) can be used to map out mode-patterns of an optical micro-resonator with high spatial accuracy. Furthermore we demonstrate how the Q-factor and center wavelength of such resonances can be sensitively modified by both horizontal and vertical displacement of an AFM tip consisting of either Si 3 N 4 or Si material. With a silicon tip we are able to tune the resonance wavelength by 2.3 nm, and to set Q between values of 615 and zero, by expedient positioning of the AFM tip. We find full on/off switching for less than 100 nm vertical, and for 500 nm lateral displacement at the strongest resonance antinode locations.

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An integrated intra‐laser‐cavity microparticle sensor based on a dual‐wavelength distributed‐feedback channel waveguide laser in ytterbium‐doped amorphous aluminum oxide on a silicon substrate is demonstrated. Real‐time detection and accurate size measurement of single micro‐particles with diameters ranging between 1 µm and 20 µm are achieved, which represent the typical sizes of many fungal and bacterial pathogens as well as a large variety of human cells. A limit of detection of ∼500 nm is deduced. The sensing principle relies on measuring changes in the frequency difference between the two longitudinal laser modes as the evanescent field of the dual‐wavelength laser interacts with micro‐sized particles on the surface of the waveguide. Improvement in sensitivity far down to the nanometer range can be expected upon stabilizing the pump power, minimizing back reflections, and optimizing the grating geometry to increase the evanescent fraction of the guided modes.

The standard method of measuring the response of a micro resonator with in- and output waveguides consists of detecting the output power as a function of wavelength. In this paper a complementary method by means of quantitative image analysis is proposed. A vertically coupled waveguide microring resonator has been characterized with this method by projecting the scattered power of the device to an IR camera and analyzing the image as a function of wavelength. The reliability of this method has been confirmed by comparison with the standard measurement.

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