This paper presents recent results on the development and control of a microgripper based on flexure joints, fabricated by LIGA and instrumented with semiconductor strain-gauge force sensors. The microgripper is the end-effector of a workstation developed to grasp and manipulate tiny objects such as the components of a typical biomedical microdevice. The development of the force control in the microgripper is of fundamental importance in order to achieve the dexterity and sensing capabilities required to perform assembly tasks for biomedical microdevices. As a step towards the definition of the force control strategy, system identification techniques have been used to model the microgripper. Results indicate that a proportional integral (PI) controller could be used to assure, at the same time, closed-loop stability of the system, and a bandwidth suitable for the intended applications. The force control is based on strain-gauge sensors which have been integrated in the microgripper and experimentally characterized. Sensor response in the idling condition and during grasp showed that they can provide useful information for force control of the microgripper.

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