Investigations of two-photon polymerization of inorganic-organic hybrid materials initiated by femtosecond Ti:sapphire laser pulses are performed. First applications of this technique for the fabrication of three-dimensional microstructures and photonic crystals in inorganic-organic hybrid polymers with a structure size down to 200 nm and a periodicity of 450 nm are discussed.
Possibilities to produce sub-diffraction limited structures in thin metal films and bulk dielectric materials using femtosecond laser pulses are investigated. The physics of ultrashort pulse laser ablation of solids is outlined. Results on the fabrication of sub-micrometer structures in 100-200 nm chrome-coated surfaces by direct ablative writing are reported. Polarization maintaining optical waveguides produced by femtosecond laser pulses inside crystalline quartz are demonstrated.
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