Nanocomposites of metal oxides are useful materials for operation in many energy conversion systems. In this study, such nanocomposites were prepared by oxidation of mixtures of iron and titanium precursor metallic thin films at 520 °C under air atmosphere. The metallic films with different iron percentages were obtained by radio frequency (RF) magnetron sputtering on glass and silicon substrates. The films were characterized by means of X-Ray Diffraction (XRD), Raman spectroscopy, UV-vis spectroscopy, High Resolution Scanning Transmission Electron Microscopy (HRSTEM), Ellipsometry and X-ray Photo-electron Spectroscopy (XPS). The results show that these films present mainly two nanometric phases, namely Fe2O3 and TiO2. A phase separation was observed; the film surface was found to be iron rich oxide or clusters of iron rich oxide (Fe x O y , x > y), whereas titanium accumulated deeply in the bulk, forming TiO 2 far below the film surface. A red shift of optical absorption as well as a relatively stable high refractive index (varying between 3.1 and 3.5) over a broad band of optical frequencies was observed for the films containing higher iron initial concentrations.
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