Aiming at the problem of dose measurement inaccuracy due to the large volume of ionization chamber in gamma knife small field measurement, a micro-volume semiconductor detector for gamma knife dose measurement was developed. The semiconductor detector was designed with six semiconductor detectors attached to a ceramic cylinder, thus avoiding the measurement directivity defect caused by the placement of a single semiconductor detector. At the same time, it also improves the sensitivity of the entire semiconductor detector. The experimental data show that the developed gamma knife semiconductor detector has the characteristics of good angular response, high sensitivity and good stability. The output dose of gamma knife in each field is measured with the developed semiconductor detector, then the calculated field output factor is consistent with the manufacturer's factor, so the developed semiconductor detector is suitable for measuring the output dose in small field.