Abstract:第 50 卷 第 1 期/2023 年 1 月/中国激光 show a significant increase in the surface transmissivity of lithium niobate with increasing nanostructure height. Upon comparing the experimental data with the simulations, the results for the transmissivity of the lithium niobate primary wafer are found to be consistent (Fig. 11), and the height and RMS roughness of the conical subwavelength structure on the lithium niobate surface increase with an increase in the incident energy, etching time, and ion beam current. When the inci… Show more
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