结构光照明显微成像技术在集成电路掩模检测中的应用

Wei Xin, 魏鑫; Liu Zexu, 刘泽旭; Zhang Ziyi, 张子怡; Chen Yunyi, 陈韫懿; Yang Wenhe, 杨文河; Cao Jing, 曹晶; Lin Nan, 林楠

doi:10.3788/aos240585

光学学报

2024

DOI: 10.3788/aos240585

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结构光照明显微成像技术在集成电路掩模检测中的应用

魏鑫 Wei Xin,

刘泽旭 Liu Zexu,

张子怡 Zhang Ziyi

et al.

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结构光照明显微成像技术在集成电路掩模检测中的应用

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References 21 publications

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