积分散射测量在激光陀螺超光滑基片质量检测中的应用

Abstract

Integrated scatterometer for qualification of superpolished substrates for laser-gyro by surface scatter loss measurement is constructed. Different from the qualification of substrate by surface roughness, the scatterometer measures the forward surface scatter loss to check whether the mirror made of the substrate will be suitable for the required laser-gyro lock-in specification. The scatterometer utilizes convex lens instead of integrating sphere to collect scatter light. Special sample support and baffle are designed to block unwanted light. The result of stability test is given, which is about 0.4% over 10 h.

Three-position method for leveling optical surface automatically based on 2D PSD

“…In some fields of optical measurements, the sample is required to be level before measured [1] , for example qualification of superpolished substrate using Total Integrated Scatterometer [2] , where the substrate's measured surface has to be kept parallel to the translation plane while performing scan test using 2D motorized translation stages. Therefore, the sample's attitude needs to be known and leveled after fixed onto the scatterometer.…”