用于光学显微成像的无像差双二维微机电系统振镜光束扫描方法

Zhang Guozhuo, 张国卓; Wang Xu, 王旭; Wang Yun, 王允; Zhao Weiqian, 赵维谦; Qiu Lirong, 邱丽荣; Cui Han, 崔晗

doi:10.3788/aos230984

光学学报

2023

DOI: 10.3788/aos230984

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用于光学显微成像的无像差双二维微机电系统振镜光束扫描方法

张国卓 Zhang Guozhuo,

王旭 Wang Xu,

王允 Wang Yun

et al.

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用于光学显微成像的无像差双二维微机电系统振镜光束扫描方法

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