新規な非酸化物系ゾルゲル法によるメソポーラスアモルファス Si-C-N 膜の合成と評価

Abstract

Note péÉÅá~ä fëëìÉ Äó dìÉëí bÇáíçêëW lêÖ~åáÅ-íç-fåçêÖ~åáÅ`çåîÉêëáçå mêçÅÉëë Ñçê mçäóãÉê-aÉêáîÉÇ`Éê~ãáÅë póåíÜÉëáë~åÇ`Ü~ê~ÅíÉêáò~íáçå çÑ kçîÉä kçålñáÇÉ pçä-dÉä aÉêáîÉÇ jÉëçéçêçìë^ãçêéÜçìë pá-`-k jÉãÄê~åÉë A novel sol-gel-derived preceramic polymer, namely polyorganosilylcarbodiimide, was synthesized for fabrication of thermally stable amorphous Si-C-N membranes. The gelation process as well as the viscosity of the polyorganosilylcarbodiimide was adjusted for spin coating by reacting a mixture of alkyl and dialkyl chlorosilane monomers with bistrimethylsilylcarbodiimide. The polymeric precursor film was successfully fabricated on a porous substrate by solvent-free spin coating, subsequently converted into a mesoporous amorphous Si-C-N thin film by pyrolysis at 1000c C in Ar. SEM observation as well as N 2 sorption isotherm analysis exhibited the formation of meso-pore channels within the amorphous thin layer. These results indicate that the novel polyorganosilylcarbodiimide developed in this study is suitable for fabricating meso-porous amorphous membranes in the ternary Si-C-N system and with high thermal and chemical stability.

Sol–gel derived Si/C/O/N‐materials: molecular model compounds, xerogels and porous ceramics

“…This wileyonlinelibrary.com/journal/aoc corresponds well with investigations on the preparation of silylcarbodiimide-derived Si/C/N membranes. [22] Preliminary investigation of the pyrolysis behavior above 1000…”

“…Owing to the pseudo-chalcogenic character of the carbodiimide group, it adopts the role of the oxygen atom, whereas the trimethylsilyl group can be considered as an analog of the protons in a hydrolytic process. [13,16,17] Several materials in the systems Si/C, [18] B/C/N, [19,20] Si/C/N, [21,22] Si/B/C/N, [23 -25] and Si/Al/C/N [26] possessing high thermal resistance and chemical stability, have been synthesized using this particular kind of sol-gel route. Several further reports on related work on BTSC-derived element carbodimides and their use as precursors for hybrid and ceramic materials have been published.…”

Formation of Micro and Mesoporous Amorphous Silica-Based Materials from Single Source Precursors

“…Recently, micro and mesoporous structure formations have been often discussed for the polymer-derived amorphous silicon nitride [7,8], silicon carbide [9][10][11][12][13][14], silicon carbonitride (Si-C-N) [15], silicon oxycarbide (Si-O-C) [16][17][18] and quaternary Si-M-C-N (M = B [19,20], Ni [21]). During the crosslinking and subsequent high-temperature pyrolysis under an inert atmosphere of polymer precursors, by-product gases such as CH 4 , NH 3 and H 2 were detected [5,22], and the microporosity in the polymer-derived non-oxide amorphous ceramics could be assigned to the release of the small gaseous species formed in-situ [8,22].…”

Polymer-derived amorphous silica-based inorganic–organic hybrids having alkoxy groups: intermediates for synthesizing microporous amorphous silica materials

“…4) 6) Perhydropolysilazane (PHPS) has been extensively studied as a carbon free polymer precursor, that is readily oxidized to yield pure silica with a high ceramic yield, either by pyrolysis in air, 7) or by exposure to aqueous ammonia vapour at room temperature. 8), 9) To date, micro-and meso-porous structures formation has been often discussed for the polymer-derived amorphous ceramics such as silicon nitride (Si N), 10), 11) silicon carbide (Si C), 12) 17) silicon carbonitride (Si C N), 18) quaternary Si M C N (M=B, 19), 20) Ni 21) ), silicon oxycarbide (SiOC), 22) 24) and silica (Si O). 7),25), 26) During the crosslinking and subsequent hightemperature pyrolysis of polymer precursors, by-product gases such as CH 4 , NH 3 and H 2 were detected, 5), 27) and the microporosity in the polymer-derived non-oxide amorphous ceramics could be assigned to the release of the small gaseous species formed in-situ.…”