基于白光扫描干涉法的光纤折射率分布的测量

Li, 李敏 Min; Song, 宋五洲 Wuzhou; Zhan, 湛位 Wei; Wu, 吴荣耀 Rongyao; Qiu, 邱锦华 Jinhua

doi:10.3788/gzxb20215004.0406004

Cited by 1 publication

(2 citation statements)

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“…where h is the height information of a certain point on the test surface, i z is the scanned location information and () i Iz is the interference intensity. The accuracy of this method is affected by the background light intensity, and it is necessary to ensure that the peak position of the interference signal is at the center of the data as much as possible to improve the measurement accuracy [7,35].…”

Section: Center Of Gravity Methods For Solving the Height Informationmentioning

confidence: 99%

“…The white-light interference-microscope objective is the core component of a white-light interferometer system. Because of the short coherence length of a white-light source, the optical path of two beams should be matched perfectly to produce interferometry [6][7][8][9][10] . However, asymmetric beam splitters will inevitably introduce additional dispersion and the dispersion will be changed by the tilt of the reference mirror, which affects the measurement accuracy.…”

Section: Introductionmentioning

confidence: 99%

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Influence of reference mirror tilting on the performances of a Michelson-type interference-microscope objective

Wu,

He,

Wang

2024

Sixth Conference on Frontiers in Optical Imaging and Technology: Novel Imaging Systems

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Asymmetric spectroscopic prism of a Michelson white-light interference- microscope objective introduces additional dispersion. The tilt of a reference mirror influences the dispersion and measurement accuracy of a white-light interference-based 3D reconstruction system. In this paper, we first numerically analyzed the performances of a Michelson-type interference-microscope objective by measuring a step structure at different tilt angles of the reference mirror. It showed that the height measurement errors were within the range of ±15nm when the tilt angles were 0°, 0.13°, 0.26°, 0.39° and 0.52 ° , respectively. Finally, a self-designed 5 × interference-microscope objective was used in the white-light 3D measurement system to experimentally demonstrate the influence of reference mirror tilting on the measurement. Both experimental and simulated results are in good agreement, showing that the tilt angle of the reference mirror in a 5× Michelson interference-microscope objective should be less than 0.39° while maintaining a measurement error less than ±15nm. We believe our results can provide a theoretical study for the assembly of reference mirror in a Michelson interference-microscope objective.

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Section: Center Of Gravity Methods For Solving the Height Informationmentioning

confidence: 99%