垂直腔面发射半导体激光器氧化优化研究

Abstract

Objective Vertical cavity surfaceemitting lasers (VCSELs) have advantages such as a single longitudinal mode, a low threshold, and ease of twodimensional integration. VCSELs have been widely used in data transmission, optical communication, and threedimensional sensing. Oxidation is the most common process for oxideconfined VCSELs. AlGaAs materials with high Al contents are oxidized via wet oxidation to form oxide apertures of aluminum oxide, and the structures of oxide apertures with different shapes