共轭涡旋光干涉精密位移测量方法与系统

Abstract

Objective Accurate precision displacement measurement systems are of great importance to the revolution in human scientific research and the iterative upgrade of industrial manufacturing. The research on vortex beams is developing rapidly, with promising applications. The vortex beam has a spiral phase, and each photon of the beam carries orbital angular momentum. With the continuous improvement of the production and detection technology for vortex beams, the research on their applications in precision displacement measurement has been on the increase.