Фазовый состав, кристаллическая структура, диэлектрические и сегнетоэлектрические свойства тонких пленок Ba-=SUB=-2-=/SUB=-NdFeNb-=SUB=-4-=/SUB=-O-=SUB=-15-=/SUB=-, выращенных на подложке Si(001) в атмосфере кислорода
Abstract:The phase composition, nanostructure, and properties of Ba2NdFeNb4O15/Si(001) multiferroic thin films have been studied by X-ray diffraction analysis, scanning probe microscopy, and capacitance-voltage characteristics analysis. The RF cathode sputtering in an oxygen atmosphere was used for films fabrication. It has been found that the obtained Ba2NdFeNb4O15 films are single-phase, impurity-free, polycrystalline textured (c-oriented), and the out-of-plane strain is 0.8%, which leads to the presence of ferroelec… Show more
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