The vacancy formation dynamics in doped semicon-
ductor heterostructures with quantum dots (QDs) formed in the
AlAs anionic sublattice has been studied. A theoretical model that
describes the effect of doping on the vacancy generation dynamics
is constructed. It is shown that the generation of positively
charged arsenic vacancies is more probable than the generation
of neutral ones at high hole concentrations. On the other hand,
at high electron concentrations, the formation of neutral arsenic
vacancies is more efficient than that positively charged ones. It has
been experimentally revealed that the vacancy-stimulated high-
temperature diffusion of antimony is enhanced (suppressed) in
p-(n-)-doped heterostructures with Al(Sb,As)/AlAs QDs.