Определение Плотности Электронов В Аргоновой Струе Диэлектрического Барьерного Разряда С Помощью СВЧ Волноводного Фильтра

Abstract

Using a waveguide microwave filter, the electron density in an argon plasma jet of a dielectric barrier discharge was determined. The dynamic of the electron density behavior during the period of applied voltage with a frequency of about 100 kHz was determined. The 4 maxima of the average concentration, which are about 1013 cm-3, were observed.