Abstract:The level set method was generalized for simulating the evolution of the surface of multilayer substrates under focused ion beam irradiation. For a correct description of such process the calculations took into account the sputtering yield angular dependences, the densities of the irradiated materials and it was considered that sputtered atoms can escape from different layers of the substrate. Comparison of the calculation results with experimental data for test structures formed in a two-layer silicon dioxide… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.