Лазерное Травление Германия

Abstract

When studying the scanning of the polished surface of germanium single crystals by focused pulse-frequency radiation of an ultraviolet Nd:YAG laser, it was found that at subthreshold energy densities (at E ͠͠ 0.5–1.15 J/cm2), in the absence of noticeable traces of crater formation, laser etching was observed. It is assumed that the centers of ablation nucleation are dislocations coming out on the crystal surface.