Abstract:The paper presents the results of experiments in the fabrication and research of properties of photodetector structures on the basis of monolayer graphene produced by chemical vapor deposition. The base structure was the geometry of a Ta2O5 vertical microcavity with a lower dielectric SiO2/Ta2O5 distributed Bragg reflector with a resonance wavelength of about 850 nm. The conditions were optimized for the transfer and fabrication of mesas in the graphene layer on the microcavity surface. The diagnostics of the … Show more
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