Abstract:Crystallization of amorphous titanium oxide films synthesized by magnetron sputtering was carried out at temperatures of 700, 800, and 900 oC in an oxygen atmosphere. The refractive index of the films increases during crystallization with a time constant that depends on temperature, which made it possible to determine the activation energy of the crystallization process on the order of 0.6 eV. The growth kinetics model for the titanium oxide nanocrystals, which is used in this work, showed that the indicated a… Show more
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