Газочувствительные свойства тонких пленок, полученных методом термооксидирования поверхности монокристаллов InP

Кострюков, В. Ф.; Миттова, И. Я.; Ali, S.

doi:10.31857/s0002337x20010078

Неорган. матер.

2020

DOI: 10.31857/s0002337x20010078

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Газочувствительные свойства тонких пленок, полученных методом термооксидирования поверхности монокристаллов InP

В. Ф. Кострюков¹,

И. Я. Миттова²,

S. Ali³

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Газочувствительные свойства тонких пленок, полученных методом термооксидирования поверхности монокристаллов InP

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