Abstract:The dependence of iodine incorporation in CdTe layers on the deposition conditions during metalorganic vapor phase epitaxy is investigated. The growth of the layers was carried out from dimethylcadmium and diethyltellurium in the hydrogen flow in a vertical reactor with a hot wall condition at a total pressure of 20 kPa. The total iodine concentration was determined by secondary ion mass spectrometry, the electrically active concentration was determined from the Hall effect measurement. The iodine incorporatio… Show more
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