Πολυμερικά Υλικά Και Διεργασίες Για Μικρολιθογραφία Σε Λεπτά Υμένια

Niakoula, Dimitra; Νιάκουλα, Δήμητρα

doi:10.12681/eadd/20799

DOI: 10.12681/eadd/20799

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Πολυμερικά Υλικά Και Διεργασίες Για Μικρολιθογραφία Σε Λεπτά Υμένια

Dimitra Niakoula¹,

Δήμητρα Νιάκουλα²

Abstract: Λιθογραφία µε Έκθεση µέσω Προβολής ∆έσµης Ιόντων (Ion Projection Lithography, IPL)..

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Πολυμερικά Υλικά Και Διεργασίες Για Μικρολιθογραφία Σε Λεπτά Υμένια

Abstract: Λιθογραφία µε Έκθεση µέσω Προβολής ∆έσµης Ιόντων (Ion Projection Lithography, IPL)..

Cited by 0 publications

References 164 publications

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