1990
DOI: 10.1070/rc1990v059n09abeh003563
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α-Fluoroacrylates: synthesis, properties and use

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Cited by 29 publications
(18 citation statements)
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“…Instead, we devised α‐monofluoroacrylate systems. The energy gap between the SOMO and HOMO levels of these monomers is reduced and it becomes possible to polymerize them using a free radical initiator 74,75,76. The homopolymer of 2‐[4‐(2‐hydroxyhexafluoro‐isopropyl)cyclohexane]hexafluoroisopropyl‐α‐monofluoroacrylate (FA) was prepared by AIBN‐initiated polymerization and showed a lower absorption coefficient of 1.7 µm −1 at 157 nm, than poly(1,4‐AF) 68…”
Section: Fluorinated Polymer Resists For 157 Nm Lithographymentioning
confidence: 99%
“…Instead, we devised α‐monofluoroacrylate systems. The energy gap between the SOMO and HOMO levels of these monomers is reduced and it becomes possible to polymerize them using a free radical initiator 74,75,76. The homopolymer of 2‐[4‐(2‐hydroxyhexafluoro‐isopropyl)cyclohexane]hexafluoroisopropyl‐α‐monofluoroacrylate (FA) was prepared by AIBN‐initiated polymerization and showed a lower absorption coefficient of 1.7 µm −1 at 157 nm, than poly(1,4‐AF) 68…”
Section: Fluorinated Polymer Resists For 157 Nm Lithographymentioning
confidence: 99%
“…Various synthetic schemes have been designed for specific a-fluoroacrylonitriles [4,[9][10][11]. The most general route is based on the Horner-Wadsworth-Emmons (HWE) reaction of a cyanofluoromethyl-substituted phosphonate with carbonyl compounds [7,8,12].…”
Section: Introductionmentioning
confidence: 99%
“…The schematic representation is shown by the energy level diagram ( Figure 5). The 2-fluoroacrylates readily undergo free radical polymerization 7,8 . The fluoro substituent when present on the double bond is a π-donor and drives the energy of the SOMO to a level sufficient for propagation.…”
Section: Acrylate Systemmentioning
confidence: 99%