ZrO₂ thin-film-based sapphire fiber temperature sensor

Abstract

A submicrometer-thick zirconium dioxide film was deposited on the tip of a polished C-plane sapphire fiber to fabricate a temperature sensor that can work to an extended temperature range. Zirconium dioxide was selected as the thin film material to fabricate the temperature sensor because it has relatively close thermal expansion to that of sapphire, but more importantly it does not react appreciably with sapphire up to 1800°C. In order to study the properties of the deposited thin film, ZrO 2 was also deposited on C-plane sapphire substrates and characterized by x-ray diffraction for phase analysis as well as by atomic force microscopy for analysis of surface morphology. Using low-coherence optical interferometry, the fabricated thin-film-based sapphire fiber sensor was tested in the lab up to 1200°C and calibrated from 200°to 1000°C. The temperature resolution is determined to be 5.8°C when using an Ocean Optics USB4000 spectrometer to detect the reflection spectra from the ZrO 2 thin-film temperature sensor.

V2O5 nanowires coated yarn based temperature sensor for smart textiles

“…2b. The fabricated sensor showed an activation energy of ∼0.15 eV which is comparable to thin film-based sensors and previously reported multi-NW network-based devices [32,33]. The activation energy depends on the network of the nanowires which influences the electron scattering and the metalsemiconductor contact.…”

Fabrication and Application of Single Crystal Fiber: Review and Prospective

“…found that ZrO 2 thin film also had relatively close CTE with sapphire, but did not react with sapphire up to 1800 °C. [ 101 ] The ZrO 2 thin‐film sensor was demonstrated to work up to 1200 °C by tracking the fringe from the FP cavity.…”

Fabrication of high-temperature temperature sensor based on dielectric multilayer film on Sapphire fiber tip

“…In turn, the change in OPD results in a shift of the peak wavelength and the peak position m can be derived as follows [5,6]:…”

“…When temperature changes on the thin film, m shall shift accordingly, as is derived by material properties of the thin-film as follows [5,6]: where ˛ d is the equivalent linear thermal expansion coefficient of ZrO 2 /Al 2 O 3 /ZrO 2 (ZAZ) dielectric film and ˛ n is the equivalent linear temperature coefficient of the refractive index of the film. Thus, the increase of surrounding temperature will result in the shift of interference spectra according to Eqs.…”

“…During the past decades, optical fiber high-temperature temperature sensors had been explored including fiber Bragg gratings [1][2], Fabry-Perot Interferometers (FPIs) [4][5][6][7][8][9][10][11] and blackbody radiation for its advantages such as miniature design, electromagnetic immunity and durability to harsh environments. However, those sensors based on fiber Bragg grating and blackbody radiation do not have the advantages of miniaturization, simple configuration and low cost.…”