Zone‐resolved mass spectroscopic study on RF plasma polymerization of styrene

Chen, Meng; Yang, Tao; Zhou, Xiao

doi:10.1002/(sici)1099-0488(19960115)34:1<113::aid-polb9>3.3.co;2-8

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“…This is supported by the work of Chen et al, who have studied CW plasma polymerization of styrene. 35 They found that as the rf power input is increased from 20 to 50 W, the deposition rate of the polymer increased, and the concentration of phenyl groups in the film decreased. This is likely due to increased electron energy at higher rf powers, which causes greater fragmentation of the monomer.…”

Section: Discussionmentioning

confidence: 99%

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Characterization of Pulsed-Plasma-Polymerized Aromatic Films

1998

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Pulsed plasma polymerization is used to produce aromatic thin films from inductively coupled rf plasmas with benzene, 1,2,4-trifluorobenzene, and hexafluorobenzene as monomers. The effects of aromatic monomer fluorination and duty cycle variation on the resulting films' properties are examined. The surface and bulk properties of the films are determined using Fourier transform infrared spectroscopy (FTIR), X-ray photoelectron spectroscopy (XPS), static secondary ion mass spectrometry (SIMS), scanning electron microscopy (SEM), static contact angles, and differential scanning calorimetry (DSC). Analysis using these techniques shows a strong dependence of film chemistry and deposition rates on the plasma duty cycle. Systematic changes in film chemistry are observed with the lowest duty cycles producing films containing substituted aromatic rings. On the basis of the SIMS, XPS, and DSC data, films deposited under the optimal pulsed conditions are similar to polystyrene in structure but are more complex, somewhat cross-linked networks. These studies show pulsed plasma polymerization affords high control over film chemistry and properties.

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Section: Discussionmentioning

confidence: 99%

“…Cross-links in our pulsed benzene films are likely formed by gas-phase C 6 H 5 + ions which lose their charge with wall collisions. 35 Polymerization is then initiated through abstraction of H from adsorbed C 6 H 6 molecules. This abstraction reaction generates a free radical center, from which a branch can grow.…”

Section: Discussionmentioning

confidence: 99%