ZnO thick films for NO2 detection: effect of different nanostructures on the sensors’ performances

Ziegler, Daniele; Marchisio, Andrea; Palmero, Paola; Pugliese, Diego; Cauda, Valentina; Tulliani, Jean‐Marc

doi:10.1007/s10854-019-02463-x

Cited by 5 publications

(1 citation statement)

References 46 publications

(54 reference statements)

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“…Yoshiki et al [122] developed an electroless deposition process for copper deposition with improved adhesion on the smooth glass substrate without surface etching. ZnO thin films have applications in chemical sensors [164][165][166][167][168][169][170][171][172], piezoelectric transducers [173][174][175][176][177][178], and photovoltaics [179][180][181][182][183][184]. ZnO thin film between the electroless deposited metal film and glass act as a unique adhesive layer.…”

Section: Zno Thin-film-based Electroless Depositionmentioning

confidence: 99%

A critical review of copper electroless deposition on glass substrates for microsystems packaging applications

Pawar

Dixit

2022

Surface Engineering

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This article reviews the state-of-the-art electroless copper deposition on glass substrates and the associated challenges.The well-known issue of poor adhesion of electroless copper with the glass substrate was addressed and later, improved bymodifying the surface energy using a specific chemical treatment or by creating localized surface roughening. Localized surfaceregions in the glass were created by abrasive-based ultrasonic machining and hightemperature electrochemical-discharge machiningtechniques. The effect of critical process parameters on the surface roughness and morphology was explained. Both qualitative andquantitative adhesion measurement techniques, such as cross-hatch tests and 90°/180°p eel adhesion tests, were presented. Theadhesion strength is affected by the surface roughness of the substrate and residual stress build-up in the film. As the build-up stresscan be released by the post-deposition annealing, the adhesion strength is further increased. Finally, the electroless coppertechnology in making through-glass-vias and embedded redistribution lines are presented.

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Section: Zno Thin-film-based Electroless Depositionmentioning

confidence: 99%

A critical review of copper electroless deposition on glass substrates for microsystems packaging applications

Pawar

Dixit

2022

Surface Engineering

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Fabrication and ethanol sensing of sol–gel grown zinc oxide powder: the effect of cobalt and copper doping

Khatibani

Shabankhah

2021

Appl. Phys. A

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High-performance NO2 gas sensor based on bimetallic oxide CuWO4 decorated with reduced graphene oxide

Zhang

2020

J Mater Sci: Mater Electron

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ZnO thick films for NO2 detection: effect of different nanostructures on the sensors’ performances

Abstract: This version of the article has been accepted for publication, after peer review (when applicable) and is subject to Springer Nature's AM terms of use, but is not the Version of Record and does not reflect postacceptance improvements, or any corrections.

Cited by 5 publications

References 46 publications

A critical review of copper electroless deposition on glass substrates for microsystems packaging applications

A critical review of copper electroless deposition on glass substrates for microsystems packaging applications

Fabrication and ethanol sensing of sol–gel grown zinc oxide powder: the effect of cobalt and copper doping

High-performance NO2 gas sensor based on bimetallic oxide CuWO4 decorated with reduced graphene oxide

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